SA Features
IKO Alignment Stage SA uses IKO C-Lube Linear Way L in the linear motion rolling guide portion, IKO Crossed Roller Bearing in the revolving guiding portion, and adopts direct-drive system in the driving portion. It is an alignment stage that realizes low cross section, compact, XYθ movement.
By the combination of high resolution linear scale and full closed loop control, Alignment Stage SA･･･D realizes high-accuracy positioning operation without any backlash.
It is most suitable for alignment processing utilizing image processing such as semiconductor and liquid crystal related manufacturing equipment, and positioning mechanism for measuring equipment and inspection instruments that require clean environments.
