Nano Linear NT・・・H
IKO Nano Linear NT・・・H is a direct-drive moving-magnet type positioning table, which has magnets and an optical linear scale incorporated into a moving table made of steel, and stator coils and linear scale head incorporated in a steel bed.
For guiding parts of the table, an IKO Crossed Roller Way is used in combination with a linear motor and a high-resolution linear encoder to facilitate highly accurate positioning.
Furthermore, except for the linear motion rolling guides, mechanical contact is completely eliminated by adopting the unique design of a wireless moving table in which the linear scale sensor is arranged on the bed. Therefore, the table generates very little dust and provides a high level of cleanliness.
IKO Nano Linear NT・・・H is most suitable for use as a compact positioning mechanism for semiconductor and liquid crystal related equipment and measuring instrument and assembly systems where cleanliness is essential.
Product Features
Basic specifications of Nano Linear NT88H
Model | High accuracy type NT…H | |||
---|---|---|---|---|
NT88H25 | NT88H65 | |||
Model and size | ||||
Sectional shape |
||||
Maximum thrust N | 25 |
25 |
||
Rated thrust N |
5 | 5 | ||
Maximum load mass kg | 5 | 5 | ||
Effective stroke length mm |
25 | 65 | ||
Resolution μm | 0.01 | 0.05 | 0.01 | 0.05 |
Maximum speed mm/s |
90 | 400 | 90 | 400 |
Positioning repeatability μm | ±0.1 | ±0.1 |
Some products are not shown in the catalogue. Also, modifications can be made to meet your requirements. Please do not hesitate to make inquiries.